CONTRIBUTION A L'ETUDE DES PROPRIETES DES RESINES PHOTOSENSIBLES ET DE LEUR APPLICATION A LA MICROLITHOGRAPHIE

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Material Type: 博士論文
Title: CONTRIBUTION A L'ETUDE DES PROPRIETES DES RESINES PHOTOSENSIBLES ET DE LEUR APPLICATION A LA MICROLITHOGRAPHIE
Author/Editor: Brochet, Alain.
Author Heading: Brochet, Alain.
Publication, Distribution, etc.: Orsay : Université de Paris XI (Paris-Sud)
Publication Date: 1976.
Extent: 134p.
Degree grantor/type: Université de Paris XI (Paris-Sud)
Date Granted: 1976.
Date Granted (W3CDTF): 1976
Note (Dissertation): 博士論文
Thesis (doctoral) --Université de Paris XI (Paris-Sud) , 1976.
Place of Publication (Country Code): FR
Text Language Code: fre
Holding library: 国立国会図書館
Call No.: M-DIFR-1120
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003420495
http://id.ndl.go.jp/bib/000003420495
Bibliographic Record Category (NDL): 216