LITHOGRAPHIE SUBMICRONIQUE PAR FAISCEAU D'ELECTRONS A HAUTE TENSION (100 keV)

Name of awarding university/degree: Université Paul Sabatier (Université de Toulouse III)

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Material Type: 博士論文
Title: LITHOGRAPHIE SUBMICRONIQUE PAR FAISCEAU D'ELECTRONS A HAUTE TENSION (100 keV)
Author/Editor: Camon, Henri.
Author Heading: Camon, Henri.
Publication, Distribution, etc.: Toulouse : Université Paul Sabatier (Université de Toulouse III)
Publication Date: 1984.
Extent: 107p.
Degree grantor/type: Université Paul Sabatier (Université de Toulouse III)
Date Granted: 1984.
Date Granted (W3CDTF): 1984
Note (Dissertation): 博士論文
Thesis (doctoral) --Université Paul Sabatier (Université de Toulouse III) , 1984.
Place of Publication (Country Code): FR
Text Language Code: fre
Holding library: 国立国会図書館
Call No.: M-DIFR-7920
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003424074
http://id.ndl.go.jp/bib/000003424074
Bibliographic Record Category (NDL): 216