PREPARATION AND ELECTRICAL CHARACTERIZATION OF SILICON STRUCTURES FORMED BY WAFER BONDING

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Material Type: 博士論文
Title: PREPARATION AND ELECTRICAL CHARACTERIZATION OF SILICON STRUCTURES FORMED BY WAFER BONDING
Author/Editor: Bengtsson, Stefan.
Author Heading: Bengtsson, Stefan.
Publication, Distribution, etc.: Göteborg : Chalmers Tekniska Högskola
Publication Date: 1991.
Extent: 1v.
Degree grantor/type: Chalmers Tekniska Högskola
Date Granted: 1991.
Date Granted (W3CDTF): 1991
Note (Dissertation): 博士論文
Thesis (doctoral) --Chalmers Tekniska Högskola, 1991.
Place of Publication (Country Code): SE
Text Language Code: eng
Note (General): Chalmers University of Technology.
Holding library: 国立国会図書館
Call No.: M-DISC-832
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003433477
http://id.ndl.go.jp/bib/000003433477
Bibliographic Record Category (NDL): 216