Application of Quantum Chemistry Calculations in Modeling of Chemical Vapor Deposition Processes

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Material Type: 博士論文
Title: Application of Quantum Chemistry Calculations in Modeling of Chemical Vapor Deposition Processes
Author/Editor: Simka, Harsono Siem.
Author Heading: Simka, Harsono Siem.
Publication, Distribution, etc.: Cambridge : Massachusetts Institute of Technology
Publication Date: 1998.
Extent: 3 microfiches (241 fr.) : negative, ill.
Degree grantor/type: Massachusetts Institute of Technology
Date Granted: 1998.
Date Granted (W3CDTF): 1998
Note (Dissertation): 博士論文
Thesis (doctoral) --Massachusetts Institute of Technology, 1998.
Place of Publication (Country Code): US
Text Language Code: eng
Note (Material Type): [microform]
Note (Bibliography): Includes bibliographies.
Holding library: 国立国会図書館
Call No.: LS-DIMIT-98-314
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003440095
http://id.ndl.go.jp/bib/000003440095
Bibliographic Record Category (NDL): 216