Structure and Properties of Si-C-N and B-C-N Thin Films Prepared by Magnetron Sputtering (Linköping Studies in Science and Technology. thesis ; No. 816)

Structure and Properties of Si-C-N and B-C-N Thin Films Prepared by Magnetron Sputtering

(Linköping Studies in Science and Technology. thesis ; No. 816)

Call No. (NDL): M-DISW-93
Bibliographic ID of National Diet Library: 000003446794

Material type: 博士論文

Author: Torun Berlind.

Publisher: Linköpings Universitet

Publication date: 2000.

Material Format: Paper

Capacity, size, etc.: [58] p.

Name of awarding university/degree: Linköpings Universitet

View All

Notes on use

Note (General)：: Linköping University.

Search by Bookstore

Bibliographic Record

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Paper

Material Type: 博士論文
ISBN: 9172196920
Title: Structure and Properties of Si-C-N and B-C-N Thin Films Prepared by Magnetron Sputtering
Author/Editor: Torun Berlind.
Series Title: Linköping Studies in Science and Technology. thesis ; No. 816
Author Heading: Berlind, Torun.
Publication, Distribution, etc.: Linköping : Linköpings Universitet
Publication Date: 2000.
Extent: [58] p.
Degree grantor/type: Linköpings Universitet
Date Granted: 2000.
Date Granted (W3CDTF): 2000
Note (Dissertation): 博士論文
Thesis (doctoral) --Linköpings Universitet, 2000.
Place of Publication (Country Code): SE
Text Language Code: eng
Note (General): Linköping University.
Note (Bibliography): Includes bibliographies.
Holding library: 国立国会図書館
Call No.: M-DISW-93
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003446794
http://id.ndl.go.jp/bib/000003446794
Bibliographic Record Category (NDL): 216