16th European conference on mask technology for integrated circuits and microcomponents : Nov 1999, Munich, Germany. (SPIE Proceedings ; 3996)

16th European conference on mask technology for integrated circuits and microcomponents : Nov 1999, Munich, Germany.

(SPIE Proceedings ; 3996)

Author: VDE/VDI. Society Microelectronics, Micro- and Precision Engineering (GMM)ほか

Notes on use

Note (General)：: Papers.Index term: mask technology ; integrated circuits ; microcomponents ; VDI ; VDE.BL shelfmark: 6823.100 vol 3996 2000.

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Material Type: 図書
ISBN: 0819436143 (pbk)
ISSN: 0277-786X
Title: 16th European conference on mask technology for integrated circuits and microcomponents : Nov 1999, Munich, Germany.
Series Title: SPIE Proceedings ; 3996
Author Heading: VDE/VDI. Society Microelectronics, Micro- and Precision Engineering (GMM)
Forschungszentrum Karlsruhe. Institute for Microstructure Technology.
Publication, Distribution, etc.: SPIE
Publication Date: 2000.
Publication Date (W3CDTF): 2000
Extent: v.
Alternative Title: mask technology ; integrated circuits ; microcomponents ; VDI ; VDE
NDLC: M17
Note (General): Papers.
Index term: mask technology ; integrated circuits ; microcomponents ; VDI ; VDE.
BL shelfmark: 6823.100 vol 3996 2000.
Holding library: 国立国会図書館
Call No.: M17-00-1144
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003447680
http://id.ndl.go.jp/bib/000003447680
UKMARC No.: G05984471
Bibliographic Record Category (NDL): 215