Copper interconnect status -- : Copper interconnect status : Session : Jul 1999, San Francisco, CA.

• Material Type: 図書
• ISBN: 1892568306 (pbk)
• Title: Copper interconnect status -- : Copper interconnect status : Session : Jul 1999, San Francisco, CA.
• Author Heading: Semiconductor Equipment and Materials International.
• Publication, Distribution, etc.: Semiconductor Equipment and Materials International
• Publication Date: 1999.
• Publication Date (W3CDTF): 1999
• Extent: v.
• Alternative Title: Held as part of SEMICON West 99; copper interconnect status ; SEMICON West ; semiconductor equipment
• NDLC: M17
• Note (General): Selected papers.; Held as part of SEMICON West 99.; Index term: copper interconnect status ; SEMICON West ; semiconductor equipment.; BL shelfmark: 8238.654 1999.
• Holding library: 国立国会図書館
• Call No.: M17-01-2349
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000003451126; http://id.ndl.go.jp/bib/000003451126
• UKMARC No.: G06013377
• Bibliographic Record Category (NDL): 215