Low K dielectric materials technology conference : Jul 1999, San Francisco, CA.

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Note (General)：: Selected papers and presentations.Held as part of SEMICON West 99.Index term: low K dielectric materials technology ; SEMICON West ; semiconductor equ...

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Material Type: 図書
ISBN: 1892568357 (pbk)
Title: Low K dielectric materials technology conference : Jul 1999, San Francisco, CA.
Author Heading: Semiconductor Equipment and Materials International.
Publication, Distribution, etc.: Semiconductor Equipment and Materials International
Publication Date: 1999.
Publication Date (W3CDTF): 1999
Extent: v.
Alternative Title: Held as part of SEMICON West 99
low K dielectric materials technology ; SEMICON West ; semiconductor equipment
NDLC: M17
Note (General): Selected papers and presentations.
Held as part of SEMICON West 99.
Index term: low K dielectric materials technology ; SEMICON West ; semiconductor equipment.
BL shelfmark: 8238.654 1999.
Holding library: 国立国会図書館
Call No.: M17-01-2351
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003451128
http://id.ndl.go.jp/bib/000003451128
UKMARC No.: G06013379
Bibliographic Record Category (NDL): 215