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図書

Micromachining of elements with optical and other submicrometer dimensional and surface specifications : Topical meeting : 4th International symposium on optical and optoelectronic applied science and engineering : Apr 1987, The Hague. (SPIE Proceedings ; 803)

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Micromachining of elements with optical and other submicrometer dimensional and surface specifications : Topical meeting : 4th International symposium on optical and optoelectronic applied science and engineering : Apr 1987, The Hague.

(SPIE Proceedings ; 803)

Call No. (NDL)
M17-87-2539
Bibliographic ID of National Diet Library
000003470141
Material type
図書
Author
Society of Photo-Optical Instrumentation Engineering.ほか
Publisher
SPIE
Publication date
1987.
Material Format
Paper
Capacity, size, etc.
v.
NDC
-
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Notes on use

Note (General)：

Papers.Index term: submicrometer dimensional specifications ; SPIE ; optoelectronic applied science ; micromachining ; ANRT ; surface specifications.B...

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Paper

Material Type
図書
ISBN
0892528389 (pbk)
Title
Micromachining of elements with optical and other submicrometer dimensional and surface specifications : Topical meeting : 4th International symposium on optical and optoelectronic applied science and engineering : Apr 1987, The Hague.
Series Title
SPIE Proceedings ; 803
Author Heading
Society of Photo-Optical Instrumentation Engineering.
Association Nationale de la Recherche Technique.
Publication, Distribution, etc.
SPIE
Publication Date
1987.
Publication Date (W3CDTF)
1987
Extent
v.
Alternative Title
submicrometer dimensional specifications ; SPIE ; optoelectronic applied science ; micromachining ; ANRT ; surface specifications