Optical microlithographic technology for integrated circuit fabrication and inspection : Topical meeting : 4th International symposium on optical and optoelectronic applied science and engineering : Apr 1987, The Hague. (SPIE Proceedings ; 811)

Optical microlithographic technology for integrated circuit fabrication and inspection : Topical meeting : 4th International symposium on optical and optoelectronic applied science and engineering : Apr 1987, The Hague.

(SPIE Proceedings ; 811)

Call No. (NDL): M17-87-2543
Bibliographic ID of National Diet Library: 000003470145

Material type: 図書

Author: Society of Photo-Optical Instrumentation Engineers.ほか

Publisher: SPIE

Publication date: 1987.

Material Format: Paper

Capacity, size, etc.: v.

NDC: -

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Notes on use

Note (General)：: Papers.Index term: integrated circuit fabrication ; SPIE ; optical microlithographic technology ; optoelectronic applied science ; ANRT.BL shelfmark: ...

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Paper

Material Type: 図書
ISBN: 089252846X (pbk)
Title: Optical microlithographic technology for integrated circuit fabrication and inspection : Topical meeting : 4th International symposium on optical and optoelectronic applied science and engineering : Apr 1987, The Hague.
Series Title: SPIE Proceedings ; 811
Author Heading: Society of Photo-Optical Instrumentation Engineers.
Association Nationale de la Recherche Technique.
Publication, Distribution, etc.: SPIE
Publication Date: 1987.
Publication Date (W3CDTF): 1987
Extent: v.
Alternative Title: integrated circuit fabrication ; SPIE ; optical microlithographic technology ; optoelectronic applied science ; ANRT
NDLC: M17
ND
Note (General): Papers.
Index term: integrated circuit fabrication ; SPIE ; optical microlithographic technology ; optoelectronic applied science ; ANRT.
BL shelfmark: 6823.100 vol 811 1987.
Holding library: 国立国会図書館
Call No.: M17-87-2543
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003470145
http://id.ndl.go.jp/bib/000003470145
UKMARC No.: G00985102
Bibliographic Record Category (NDL): 215