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図書

Interferometric metrology : Conference : 31st Annual international technical symposium on optical and optoelectronic applied science and engineering : Aug 1987, San Diego, CA. (SPIE Proceedings ; 816)

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Interferometric metrology : Conference : 31st Annual international technical symposium on optical and optoelectronic applied science and engineering : Aug 1987, San Diego, CA.

(SPIE Proceedings ; 816)

Call No. (NDL)
M17-88-0932
Bibliographic ID of National Diet Library
000003471400
Material type
図書
Author
Society of Photo-Optical Instrumentation Engineers.
Publisher
SPIE--The International Society for Optical Engineering
Publication date
c1988.
Material Format
Paper
Capacity, size, etc.
v.
NDC
-
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Notes on use

Note (General):

Papers.Critical reviews of optical science and technology.Index term: interferometric metrology ; SPIE....

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Paper

Material Type
図書
ISBN
0892528516 (pbk)
Publication Date
c1988.
Publication Date (W3CDTF)
1988
Extent
v.
Alternative Title
Critical reviews of optical science and technology
interferometric metrology ; SPIE