Automated integrated circuits manufacturing : 3rd International symposium : Oct 1987, Honolulu, HI. (PV ; 88-13)

Automated integrated circuits manufacturing : 3rd International symposium : Oct 1987, Honolulu, HI.

(PV ; 88-13)

Notes on use

Note (General)：: Papers.Index term: automated integrated circuits manufacturing ; electrochemical.BL shelfmark: 6695.400 PV 88-13 1988.

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Material Type: 図書
Title: Automated integrated circuits manufacturing : 3rd International symposium : Oct 1987, Honolulu, HI.
Series Title: PV ; 88-13
Author Heading: Electrochemical Society. Dielectrics and Insulation Division.
Electrochemical Society. Electronics Division.
Publication, Distribution, etc.: Electrochemical Society
Publication Date: 1988.
Publication Date (W3CDTF): 1988
Extent: v.
Alternative Title: automated integrated circuits manufacturing ; electrochemical
NDLC: M17
ND
Note (General): Papers.
Index term: automated integrated circuits manufacturing ; electrochemical.
BL shelfmark: 6695.400 PV 88-13 1988.
Holding library: 国立国会図書館
Call No.: M17-88-1377
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003471964
http://id.ndl.go.jp/bib/000003471964
UKMARC No.: G01088866
Bibliographic Record Category (NDL): 215