Integrated manufacturing for global competitiveness : Semicon/southwest 1987 : Technical Sessions : Oct 1987, Dallas, TX.

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Note (General)：: Papers.Index term: SEMI ; Semicon/southwest ; Semiconductor Equipment.BL shelfmark: 8238.6530 1987.

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Material Type: 図書
Title: Integrated manufacturing for global competitiveness : Semicon/southwest 1987 : Technical Sessions : Oct 1987, Dallas, TX.
Author Heading: Semiconductor Equipment and Materials Institute.
Publication, Distribution, etc.: Mountain View, CA : Semiconductor Equipment & Materials Institute
Publication Date: [1987?]
Publication Date (W3CDTF): 1987
Extent: v.
Alternative Title: SEMI ; Semicon/southwest ; Semiconductor Equipment
NDLC: M17
ND
Note (General): Papers.
Index term: SEMI ; Semicon/southwest ; Semiconductor Equipment.
BL shelfmark: 8238.6530 1987.
Holding library: 国立国会図書館
Call No.: M17-88-2184
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003472874
http://id.ndl.go.jp/bib/000003472874
Bibliographic Record Category (NDL): 215