Polymers in microlithography : materials and processes : Symposium : 197th National meeting : Apr 1989, Dallas, TX. (ACS Symposium Series ; 412)

Polymers in microlithography : materials and processes : Symposium : 197th National meeting : Apr 1989, Dallas, TX.

(ACS Symposium Series ; 412)

Author: American Chemical Society. Division of Polymeric Materials: Science and Engineering.

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Note (General)：: Papers.Index term: polymers ; microlithography ; ACS.BL shelfmark: 0578.895 412 1989.

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Material Type: 図書
ISBN: 0841217017
ISSN: 0097-6156
Title: Polymers in microlithography : materials and processes : Symposium : 197th National meeting : Apr 1989, Dallas, TX.
Series Title: ACS Symposium Series ; 412
Author Heading: American Chemical Society. Division of Polymeric Materials: Science and Engineering.
Publication, Distribution, etc.: Washington, D.C. : American Chemical Society
Publication Date: 1989.
Publication Date (W3CDTF): 1989
Extent: v.
Alternative Title: polymers ; microlithography ; ACS
NDLC: M17
PA
Note (General): Papers.
Index term: polymers ; microlithography ; ACS.
BL shelfmark: 0578.895 412 1989.
Holding library: 国立国会図書館
Call No.: M17-90-0223
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003477544
http://id.ndl.go.jp/bib/000003477544
UKMARC No.: G01264158
Bibliographic Record Category (NDL): 215