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図書

Gettering and defect engineering in the semiconductor technology : 3rd International Autumn meeting : Oct 1989, Garzau, Germany. (Diffusion and Defect Data Part B Solid State Phenomena ; 6-7)

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Gettering and defect engineering in the semiconductor technology : 3rd International Autumn meeting : Oct 1989, Garzau, Germany.

(Diffusion and Defect Data Part B Solid State Phenomena ; 6-7)

Call No. (NDL)
M17-90-0464
Bibliographic ID of National Diet Library
000003477853
Material type
図書
Author
Academy of Sciences of the GDR. Institute of Semiconductor Physics.
Publisher
Sci-tech Publications
Publication date
1989.
Material Format
Paper
Capacity, size, etc.
v.
NDC
-
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Notes on use

Note (General):

Selected papers.Also known as GADEST '89.Index term: GADEST ; gettering ; defect engineering ; semiconductor technology....

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Paper

Material Type
図書
ISBN
3908044049 (pbk)
ISSN
1012-0394
Publication, Distribution, etc.
Publication Date
1989.
Publication Date (W3CDTF)
1989
Extent
v.