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図書

Vacuum mechatronics : 1st International workshop : Feb 1989, Santa Barbara, CA. (AIP Conference Proceedings ; 192) (American Vacuum Society Series ; 7) (CONF ; 9002123)

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Vacuum mechatronics : 1st International workshop : Feb 1989, Santa Barbara, CA.

(AIP Conference Proceedings ; 192) (American Vacuum Society Series ; 7) (CONF ; 9002123)

Call No. (NDL)
M17-90-0836
Bibliographic ID of National Diet Library
000003478231
Material type
図書
Author
American Institute of Physics.
Publisher
American Institute of Physics
Publication date
1989.
Material Format
Paper
Capacity, size, etc.
v.
NDC
-
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Notes on use

Note (General)：

Papers.Index term: vacuum mechatronics ; AIP.BL shelfmark: 0773.430 no 192 1989.

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Paper

Material Type
図書
ISBN
0883183943
Title
Vacuum mechatronics : 1st International workshop : Feb 1989, Santa Barbara, CA.
Series Title
AIP Conference Proceedings ; 192
American Vacuum Society Series ; 7
CONF ; 9002123
Author Heading
American Institute of Physics.
Publication, Distribution, etc.
American Institute of Physics
Publication Date
1989.
Publication Date (W3CDTF)
1989
Extent
v.
Alternative Title
vacuum mechatronics ; AIP