Microcircuit engineering 89 : 15th International conference on microlithography : Sep 1989, Cambridge. (Microelectronic Engineering ; 11)

Microcircuit engineering 89 : 15th International conference on microlithography : Sep 1989, Cambridge.

(Microelectronic Engineering ; 11)

Notes on use

Note (General)：: Papers.Index term: microcircuit engineering ; ME ; microlithography.BL shelfmark: 5758.458 1989.

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Material Type: 図書
ISBN: 0444881824
ISSN: 0167-9317
Title: Microcircuit engineering 89 : 15th International conference on microlithography : Sep 1989, Cambridge.
Series Title: Microelectronic Engineering ; 11
Publication, Distribution, etc.: Elsevier
Publication Date: 1990.
Publication Date (W3CDTF): 1990
Extent: v.
Alternative Title: microcircuit engineering ; ME ; microlithography
NDLC: M17
ND
Note (General): Papers.
Index term: microcircuit engineering ; ME ; microlithography.
BL shelfmark: 5758.458 1989.
Holding library: 国立国会図書館
Call No.: M17-90-1640
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003479162
http://id.ndl.go.jp/bib/000003479162
UKMARC No.: G01487975
Bibliographic Record Category (NDL): 215