図書

Tungsten and other advanced metals for VLSI/ULSI applications 5 : 6th Workshop : Sep 1989, San Mateo, CA : Oct 1989, Tokyo, Japan.

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Tungsten and other advanced metals for VLSI/ULSI applications 5 : 6th Workshop : Sep 1989, San Mateo, CA : Oct 1989, Tokyo, Japan.

Call No. (NDL)
M17-90-2176
Bibliographic ID of National Diet Library
000003479786
Material type
図書
Author
University of California. University Extension. Continuing Education in Engineering.ほか
Publisher
Materials Research Society
Publication date
1990.
Material Format
Paper
Capacity, size, etc.
v.
NDC
-
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Notes on use

Note (General)：

Papers.(Materials Research Society Conference Proceedings) Held in 2 parts, part 2 held in Tokyo, October 1989.Index term: tungsten ; VLSI ULSI applic...

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Paper

Material Type
図書
ISBN
1558990862 (invalid but in book)
ISSN
1048-0854
Title
Tungsten and other advanced metals for VLSI/ULSI applications 5 : 6th Workshop : Sep 1989, San Mateo, CA : Oct 1989, Tokyo, Japan.
Author Heading
University of California. University Extension. Continuing Education in Engineering.
Japan Society of Applied Physics (JSAP)
Publication, Distribution, etc.
Materials Research Society
Publication Date
1990.
Publication Date (W3CDTF)
1990
Extent
v.
Alternative Title
(Materials Research Society Conference Proceedings) Held in 2 parts, part 2 held in Tokyo, October 1989
tungsten ; VLSI ULSI applications
Held in 2 parts, part 1 held in San Mateo, CA September 1989. (Materials Research Society Conference Proceedings)
tungsten ; VLSI ULSI applications ; applied physics