図書

Photon, beam and plasma enhanced processing : Symposium 15 : Conference : Jun 1987, Strasbourg, France. (Symposia Proceedings - European Materials Research Society ; 15)

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Photon, beam and plasma enhanced processing : Symposium 15 : Conference : Jun 1987, Strasbourg, France.

(Symposia Proceedings - European Materials Research Society ; 15)

Call No. (NDL)
M17-91-1476
Bibliographic ID of National Diet Library
000003482865
Material type
図書
Author
European Materials Research Society.ほか
Publisher
Les Editions de Physique
Publication date
1987.
Material Format
Paper
Capacity, size, etc.
v.
NDC
-
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Notes on use

Note (General)：

Papers.Also contains the papers of joint session with symposium No 16 and No 17.Index term: plasma enhanced processing ; CEC ; photon enhanced process...

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Paper

Material Type
図書
ISBN
2868830617 (pbk)
Title
Photon, beam and plasma enhanced processing : Symposium 15 : Conference : Jun 1987, Strasbourg, France.
Series Title
Symposia Proceedings - European Materials Research Society ; 15
Author Heading
European Materials Research Society.
Council of Europe.
Commission of European Communities.
Publication, Distribution, etc.
Les Editions de Physique
Publication Date
1987.
Publication Date (W3CDTF)
1987
Extent
v.
Alternative Title
Also contains the papers of joint session with symposium No 16 and No 17
plasma enhanced processing ; CEC ; photon enhanced processing ; E MRS ; beam enhanced processing