Microcircuit engineering 90 : International conference on microlithography : Sep 1990, Leuven, Belgium.

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Note (General)：: Papers.Reprinted from: Microelectronic Engineering, vol 13.Index term: microcircuit engineering ; microlithography....

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Material Type: 図書
ISBN: 0444890874 (unconfirmed)
ISSN: 0167-9317
Title: Microcircuit engineering 90 : International conference on microlithography : Sep 1990, Leuven, Belgium.
Publication, Distribution, etc.: Elsevier
Publication Date: 1991.
Publication Date (W3CDTF): 1991
Extent: v.
Alternative Title: Reprinted from: Microelectronic Engineering, vol 13
microcircuit engineering ; microlithography
NDLC: M17
ND
Note (General): Papers.
Reprinted from: Microelectronic Engineering, vol 13.
Index term: microcircuit engineering ; microlithography.
BL shelfmark: 5758.810 vol 13 no 1-4 1991.
Holding library: 国立国会図書館
Call No.: M17-92-1314
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003486014
http://id.ndl.go.jp/bib/000003486014
UKMARC No.: G01668552
Bibliographic Record Category (NDL): 215