Soft-X-ray projection lithography : Topical meeting : Apr 1991, Monterey, CA. (OSA Proceedings Series ; 12)

Soft-X-ray projection lithography : Topical meeting : Apr 1991, Monterey, CA.

(OSA Proceedings Series ; 12)

Notes on use

Note (General)：: Papers.Index term: soft x ray projection lithography ; OSA.BL shelfmark: 6296.798465 vol 12 1991.

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Material Type: 図書
ISBN: 1557521875
Title: Soft-X-ray projection lithography : Topical meeting : Apr 1991, Monterey, CA.
Series Title: OSA Proceedings Series ; 12
Author Heading: Optical Society of America.
Publication, Distribution, etc.: The Society
Publication Date: 1991.
Publication Date (W3CDTF): 1991
Extent: v.
Alternative Title: soft x ray projection lithography ; OSA
NDLC: M17
MC
Note (General): Papers.
Index term: soft x ray projection lithography ; OSA.
BL shelfmark: 6296.798465 vol 12 1991.
Holding library: 国立国会図書館
Call No.: M17-92-1621
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003486378
http://id.ndl.go.jp/bib/000003486378
UKMARC No.: G01836699
Bibliographic Record Category (NDL): 215