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Commercial applications of precision manufacturing at the sub-micron level : Conference : Nov 1991, London, UK. (SPIE Proceedings ; 1573)

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Commercial applications of precision manufacturing at the sub-micron level : Conference : Nov 1991, London, UK.

(SPIE Proceedings ; 1573)

Call No. (NDL)
M17-92-1997
Bibliographic ID of National Diet Library
000003486791
Material type
図書
Author
Sira Communications.ほか
Publisher
SPIE
Publication date
1992.
Material Format
Paper
Capacity, size, etc.
v.
NDC
-
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Notes on use

Note (General):

Papers.Index term: precision manufacturing ; sub micron level ; SPIE.BL shelfmark: 6823.100 vol 1573 1992.

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Paper

Material Type
図書
ISBN
0819407038 (pbk)
Publication, Distribution, etc.
Publication Date
1992.
Publication Date (W3CDTF)
1992
Extent
v.
Alternative Title
precision manufacturing ; sub micron level ; SPIE