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Bibliographic Record
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- Material Type
- 図書
- ISBN
- 0444894187
- Author Heading
- Publication, Distribution, etc.
- Publication Date
- 1992.
- Publication Date (W3CDTF)
- 1992
- Extent
- v.
- Alternative Title
- This proceedings comprises 2 Symposia on "High energy ion implantation" and on "Ion beam synthesis of compound and elemental layers"high energy ion implantation ; high dose ion implantation ; elemental layers ; ion beam synthesis ; E MRS