図書

Tungsten and other advanced metals for ULSI applications in 1990 : 7th Workshop : Oct 1990, Dallas, TX.

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Tungsten and other advanced metals for ULSI applications in 1990 : 7th Workshop : Oct 1990, Dallas, TX.

Call No. (NDL)
M17-94-0636
Bibliographic ID of National Diet Library
000003493616
Material type
図書
Author
University of California, Berkeley. University Extension. Continuing Education in Engineering.
Publisher
Materials Research Society
Publication date
1991.
Material Format
Paper
Capacity, size, etc.
v.
NDC
-
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Notes on use

Note (General)：

Papers.(Materials Research Society Conference Proceedings)Index term: tungsten ; ULSI applications....

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Paper

Material Type
図書
ISBN
1558991123
ISSN
1048-0854
Title
Tungsten and other advanced metals for ULSI applications in 1990 : 7th Workshop : Oct 1990, Dallas, TX.
Author Heading
University of California, Berkeley. University Extension. Continuing Education in Engineering.
Publication, Distribution, etc.
Pittsburgh : Materials Research Society
Publication Date
1991.
Publication Date (W3CDTF)
1991
Extent
v.
Alternative Title
(Materials Research Society Conference Proceedings)
tungsten ; ULSI applications