Advanced metallization for ULSI applications 1992 : 9th Workshop : Oct 1992, Tempe, AZ.

Author: University of California, Berkeley. University Extension. Continuing Education in Engineering.

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Note (General)：: Papers.(Materials Research Society Conference Proceedings)Index term: advanced metallization ; ULSI applications ; metallization....

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Material Type: 図書
ISBN: 1558991921
ISSN: 1048-0854
Title: Advanced metallization for ULSI applications 1992 : 9th Workshop : Oct 1992, Tempe, AZ.
Author Heading: University of California, Berkeley. University Extension. Continuing Education in Engineering.
Publication, Distribution, etc.: Materials Research Society
Publication Date: 1992.
Publication Date (W3CDTF): 1992
Extent: v.
Alternative Title: (Materials Research Society Conference Proceedings)
advanced metallization ; ULSI applications ; metallization
NDLC: M17
ND
Note (General): Papers.
(Materials Research Society Conference Proceedings)
Index term: advanced metallization ; ULSI applications ; metallization.
BL shelfmark: 0696.9155 1992.
Holding library: 国立国会図書館
Call No.: M17-94-0729
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003493713
http://id.ndl.go.jp/bib/000003493713
UKMARC No.: G02044523
Bibliographic Record Category (NDL): 215