Gettering and defect engineering in semiconductor technology : 5th International autumn meeting : Oct 1993, Chossewitz, Germany. (Diffusion and Defect Data Part B Solid State Phenomena ; 32,33)

Gettering and defect engineering in semiconductor technology : 5th International autumn meeting : Oct 1993, Chossewitz, Germany.

(Diffusion and Defect Data Part B Solid State Phenomena ; 32,33)

Call No. (NDL): M17-94-1469
Bibliographic ID of National Diet Library: 000003494464

Material type: 図書

Author: Institut fur Halbleiterphysik Frankfurt.

Publisher: Sci-tech Publications

Publication date: 1993.

Material Format: Paper

Capacity, size, etc.: v.

NDC: -

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Notes on use

Note (General)：: Papers and abstract.Also known as GADEST '93.Index term: GADEST ; gettering ; defect engineering ; semiconductor technology....

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Paper

Material Type: 図書
ISBN: 3908450004 (pbk)
ISSN: 1012-0394
Title: Gettering and defect engineering in semiconductor technology : 5th International autumn meeting : Oct 1993, Chossewitz, Germany.
Series Title: Diffusion and Defect Data Part B Solid State Phenomena ; 32,33
Author Heading: Institut fur Halbleiterphysik Frankfurt.
Publication, Distribution, etc.: Sci-tech Publications
Publication Date: 1993.
Publication Date (W3CDTF): 1993
Extent: v.
Alternative Title: Also known as GADEST '93
GADEST ; gettering ; defect engineering ; semiconductor technology
NDLC: M17
ND
Note (General): Papers and abstract.
Also known as GADEST '93.
Index term: GADEST ; gettering ; defect engineering ; semiconductor technology.
BL shelfmark: 3584.255 vol 32-33 1993.
Holding library: 国立国会図書館
Call No.: M17-94-1469
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003494464
http://id.ndl.go.jp/bib/000003494464
UKMARC No.: G02152402
Bibliographic Record Category (NDL): 215