図書

Polymers for microelectronics : resists and dielectrics : Symposium : Apr 1992, San Francisco, CA. (ACS Symposium Series ; 537)

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Polymers for microelectronics : resists and dielectrics : Symposium : Apr 1992, San Francisco, CA.

(ACS Symposium Series ; 537)

Call No. (NDL)
M17-94-1569
Bibliographic ID of National Diet Library
000003494565
Material type
図書
Author
American Chemical Society. Division of Polymeric Materials: Science and Engineering.ほか
Publisher
-
Publication date
-
Material Format
Paper
Capacity, size, etc.
v.
NDC
-
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Notes on use

Note (General):

Papers.Held at 203rd National meeting of the ACS.Index term: polymers ; microelectronics ; ACS ; resists.

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Tokai-Hokuriku

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Paper

Material Type
図書
ISBN
0841227217
Extent
v.
Alternative Title
Held at 203rd National meeting of the ACS
polymers ; microelectronics ; ACS ; resists
NDLC
Note (General)
Papers.
Held at 203rd National meeting of the ACS.
Index term: polymers ; microelectronics ; ACS ; resists.
Holding library
国立国会図書館