Plasma processing : 10th Symposium : 185th Meeting : May 1994, San Francisco, CA. (PV ; 94-20)

Plasma processing : 10th Symposium : 185th Meeting : May 1994, San Francisco, CA.

(PV ; 94-20)

Author: Electrochemical Society. Dielectric Science and Technology Division.ほか

Notes on use

Note (General)：: Papers.Index term: plasma processing ; electrochemical.BL shelfmark: 6695.400 vol 94-20 1994.

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Material Type: 図書
ISBN: 1566770777 (pbk)
Title: Plasma processing : 10th Symposium : 185th Meeting : May 1994, San Francisco, CA.
Series Title: PV ; 94-20
Author Heading: Electrochemical Society. Dielectric Science and Technology Division.
Electrochemical Society. Electronics Division.
Publication, Distribution, etc.: Electrochemical Society
Publication Date: 1994.
Publication Date (W3CDTF): 1994
Extent: v.
Alternative Title: plasma processing ; electrochemical
NDLC: M17
MC
Note (General): Papers.
Index term: plasma processing ; electrochemical.
BL shelfmark: 6695.400 vol 94-20 1994.
Holding library: 国立国会図書館
Call No.: M17-95-0098
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003495653
http://id.ndl.go.jp/bib/000003495653
UKMARC No.: G02353903
Bibliographic Record Category (NDL): 215