Diffractometry and scatterometry : Conference : May 1993, Warsaw, Poland. (SPIE Proceedings ; 1991)

Diffractometry and scatterometry : Conference : May 1993, Warsaw, Poland.

(SPIE Proceedings ; 1991)

Author: SPIE-The International Society for Optical Engineering. Poland Chapter.ほか

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Note (General)：: Papers and abstracts.Also known as D/S-metry.Index term: diffractometry ; scatterometry ; SPIE ; D S metry....

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Material Type: 図書
ISBN: 0819412406 (pbk)
Title: Diffractometry and scatterometry : Conference : May 1993, Warsaw, Poland.
Series Title: SPIE Proceedings ; 1991
Author Heading: SPIE-The International Society for Optical Engineering. Poland Chapter.
Institute of Applied Optics (IAO) , Warsaw.
Publication, Distribution, etc.: SPIE
Publication Date: 1993.
Publication Date (W3CDTF): 1993
Extent: v.
Alternative Title: Also known as D/S-metry
diffractometry ; scatterometry ; SPIE ; D S metry
NDLC: M17
MC
Note (General): Papers and abstracts.
Also known as D/S-metry.
Index term: diffractometry ; scatterometry ; SPIE ; D S metry.
BL shelfmark: 6823.100 vol 1991 1994.
Holding library: 国立国会図書館
Call No.: M17-95-0851
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003497250
http://id.ndl.go.jp/bib/000003497250
UKMARC No.: G02381700
Bibliographic Record Category (NDL): 215