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図書

Gettering and defect engineering in semiconductor technology : 6th International autumn meeting : Sep 1995, ------. (Diffusion and Defect Data Part B Solid State Phenomena ; 47,48)

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Gettering and defect engineering in semiconductor technology : 6th International autumn meeting : Sep 1995, ------.

(Diffusion and Defect Data Part B Solid State Phenomena ; 47,48)

Call No. (NDL)
M17-96-0263
Bibliographic ID of National Diet Library
000003499378
Material type
図書
Author
Institut fur Halbleiterphysik Frankfurt-am-Oder.
Publisher
Sci-tech Publications
Publication date
1995.
Material Format
Paper
Capacity, size, etc.
v.
NDC
-
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Notes on use

Note (General):

Papers.Also known as GADEST '95. Held in Parkhotel Schloss Wulkow, near Berlin, Germany.Index term: GADEST ; gettering ; defect engineering ; semicond...

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Bibliographic Record

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Paper

Material Type
図書
ISBN
390845011X (pbk)
ISSN
0377-6883
Publication, Distribution, etc.
Publication Date
1995.
Publication Date (W3CDTF)
1995
Extent
v.