Micro electro mechanical systems an investigations [sic] of micro structures, sensors, actuators, machines and robotic systems : Workshop : Jan 1994, Oiso machi, Japan.

• Material Type: 図書
• ISBN: 0780318331 (pbk); 078031834X; 0780318358 (microfiche)
• Title: Micro electro mechanical systems an investigations [sic] of micro structures, sensors, actuators, machines and robotic systems : Workshop : Jan 1994, Oiso machi, Japan.
• Author Heading: Institute of Electrical and Electronics Engineers. Robotics and Automation Society.; American Society of Mechanical Engineers. Dynamic Systems and Control Division.; Micromachine Center.
• Publication, Distribution, etc.: IEEE
• Publication Date: 1994.
• Publication Date (W3CDTF): 1994
• Extent: v.
• Alternative Title: Also known as MEMS-94. Held on fiche. IEEE cat no 94CM3404-1; MEMS ; IEEE ; ASME ; micro electro mechanical systems
• Note (Material Type): [microform]
• NDLC: M17; M121
• Note (General): Papers and programme.; Also known as MEMS-94. Held on fiche. IEEE cat no 94CM3404-1.; Index term: MEMS ; IEEE ; ASME ; micro electro mechanical systems.; BL shelfmark: 5756.77945 1994.
• Holding library: 国立国会図書館
• Call No.: M17-95-1350-LS
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000003499605; http://id.ndl.go.jp/bib/000003499605
• UKMARC No.: G02324552
• Bibliographic Record Category (NDL): 215