図書

Application of plasma technology to surface processing : recent developments in modelling and diagnostics for process control and optimization : Colloquium : Mar 1995, London, UK. (Colloquium Digest - IEE ; 1995-149)

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Application of plasma technology to surface processing : recent developments in modelling and diagnostics for process control and optimization : Colloquium : Mar 1995, London, UK.

(Colloquium Digest - IEE ; 1995-149)

Call No. (NDL)
M17-96-1653
Bibliographic ID of National Diet Library
000003500948
Material type
図書
Author
Institution of Electrical Engineers. Science, Education and Technology Division. Professional Group S3 (Electron Physics, Discharges and Applications)
Publisher
IEE
Publication date
1995.
Material Format
Paper
Capacity, size, etc.
v.
NDC
-
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Notes on use

Note (General)：

Selected papers, abstract and programme.Index term: plasma technology ; surface processing ; IEE ; process control.BL shelfmark: 3315.470 no 149 1995.

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Paper

Material Type
図書
ISSN
0963-3308
Title
Application of plasma technology to surface processing : recent developments in modelling and diagnostics for process control and optimization : Colloquium : Mar 1995, London, UK.
Series Title
Colloquium Digest - IEE ; 1995-149
Author Heading
Institution of Electrical Engineers. Science, Education and Technology Division. Professional Group S3 (Electron Physics, Discharges and Applications)
Publication, Distribution, etc.
IEE
Publication Date
1995.
Publication Date (W3CDTF)
1995
Extent
v.
Alternative Title
plasma technology ; surface processing ; IEE ; process control