Plasma processing 11 : 11th Symposium : 189th Meeting : May 1996, Los Angeles, CA. (PV ; 96-12)

Plasma processing 11 : 11th Symposium : 189th Meeting : May 1996, Los Angeles, CA.

(PV ; 96-12)

Author: Electrochemical Society (ECS) . Dielectric Science and Technology Division.ほか

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Material Type: 図書
ISBN: 1566771641
Title: Plasma processing 11 : 11th Symposium : 189th Meeting : May 1996, Los Angeles, CA.
Series Title: PV ; 96-12
Author Heading: Electrochemical Society (ECS) . Dielectric Science and Technology Division.
Electrochemical Society (ECS) . Electronics Division.
Extent: v.
Alternative Title: plasma processing ; electrochemical
NDLC: M17
MC
Note (General): Papers.
Index term: plasma processing ; electrochemical.
Holding library: 国立国会図書館
Call No.: M17-97-0151
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003501757
http://id.ndl.go.jp/bib/000003501757
Bibliographic Record Category (NDL): 215