Gettering and defect engineering in semiconductor technology : 7th International autumn meeting : Oct 1997, Spa, Belgium. (Diffusion and Defect Data Part B Solid State Phenomena ; 57,58)

Gettering and defect engineering in semiconductor technology : 7th International autumn meeting : Oct 1997, Spa, Belgium.

(Diffusion and Defect Data Part B Solid State Phenomena ; 57,58)

Call No. (NDL): M17-97-2095
Bibliographic ID of National Diet Library: 000003504402

Material type: 図書

Author: Interuniversity Micro-Electronics Center.ほか

Publisher: -

Publication date: -

Material Format: Paper

Capacity, size, etc.: v.

NDC: -

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Notes on use

Note (General)：: Papers.Also known as GADEST '97.Index term: GADEST ; gettering ; defect engineering ; semiconductor technology.

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Paper

Material Type: 図書
ISBN: 3908450276
ISSN: 1012-0394
Title: Gettering and defect engineering in semiconductor technology : 7th International autumn meeting : Oct 1997, Spa, Belgium.
Series Title: Diffusion and Defect Data Part B Solid State Phenomena ; 57,58
Author Heading: Interuniversity Micro-Electronics Center.
Institut fur Halbleiterphysik Frankfurt an der Oder.
Extent: v.
Alternative Title: Also known as GADEST '97
GADEST ; gettering ; defect engineering ; semiconductor technology
NDLC: M17
ND
Note (General): Papers.
Also known as GADEST '97.
Index term: GADEST ; gettering ; defect engineering ; semiconductor technology.
Holding library: 国立国会図書館
Call No.: M17-97-2095
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003504402
http://id.ndl.go.jp/bib/000003504402
Bibliographic Record Category (NDL): 215