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図書

Simulation of semiconductor processes and devices : International conference : Sep 1996, Tokyo, Japan.

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Simulation of semiconductor processes and devices : International conference : Sep 1996, Tokyo, Japan.

Call No. (NDL)
M17-98-0402
Bibliographic ID of National Diet Library
000003504888
Material type
図書
Author
Japan Society of Applied Physics.ほか
Publisher
Japan Society of Applied Physics
Publication date
1996.
Material Format
Paper
Capacity, size, etc.
v.
NDC
-
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Notes on use

Note (General):

Short papers and programme.Also known as SISPAD '96. This SISPAD is the first unified conference from 3 precedent conferences: International workshop ...

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Paper

Material Type
図書
ISBN
0780327454 (pbk)
0780327462 (microfiche)
Publication, Distribution, etc.
Publication Date
1996.
Publication Date (W3CDTF)
1996
Extent
v.
Alternative Title
Also known as SISPAD '96. This SISPAD is the first unified conference from 3 precedent conferences: International workshop on numerical modeling of processes and devices for integrated circuits (NUPAD), International conference on simulation of semiconductor devices and processes (SISDEP) and International workshop on VLSI process and device modeling (VPAD). IEEE cat no 96TH8095
simulation ; semiconductor processes ; JSAP ; SISPAD ; IEEE
NDLC