図書

Crystalline defects and contamination : their impact and control in device manufacturing 2 : 2nd Symposium : Aug 1997, Paris, France. (PV ; 97-22)

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Crystalline defects and contamination : their impact and control in device manufacturing 2 : 2nd Symposium : Aug 1997, Paris, France.

(PV ; 97-22)

Call No. (NDL)
M17-98-1441
Bibliographic ID of National Diet Library
000003506308
Material type
図書
Author
Electrochemical Society. Electronics Division.ほか
Publisher
Electrochemical Society
Publication date
1997.
Material Format
Paper
Capacity, size, etc.
v.
NDC
-
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Notes on use

Note (General)：

Selected papers.Held at the Joint international meeting: 192nd Meeting of the Electrochemical Society and the 48th Annual meeting of the International...

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Paper

Material Type
図書
ISBN
1566771757
Title
Crystalline defects and contamination : their impact and control in device manufacturing 2 : 2nd Symposium : Aug 1997, Paris, France.
Series Title
PV ; 97-22
Author Heading
Electrochemical Society. Electronics Division.
International Society of Electrochemistry.
Publication, Distribution, etc.
Pennington, NJ : Electrochemical Society
Publication Date
1997.
Publication Date (W3CDTF)
1997
Extent
v.
Alternative Title
Held at the Joint international meeting: 192nd Meeting of the Electrochemical Society and the 48th Annual meeting of the International Society of Electrochemistry. Held as part of the Symposium on silicon cleaning technology
crystalline defects ; crystalling contamination ; device manufacturing ; electrochemical