Crystalline defects and contamination : their impact and control in device manufacturing 2 : 2nd Symposium : Aug 1997, Paris, France.

• Material Type: 図書
• ISBN: 1566771757
• Title: Crystalline defects and contamination : their impact and control in device manufacturing 2 : 2nd Symposium : Aug 1997, Paris, France.
• Series Title: PV ; 97-22
• Author Heading: Electrochemical Society. Electronics Division.; International Society of Electrochemistry.
• Publication, Distribution, etc.: Pennington, NJ : Electrochemical Society
• Publication Date: 1997.
• Publication Date (W3CDTF): 1997
• Extent: v.
• Alternative Title: Held at the Joint international meeting: 192nd Meeting of the Electrochemical Society and the 48th Annual meeting of the International Society of Electrochemistry. Held as part of the Symposium on silicon cleaning technology; crystalline defects ; crystalling contamination ; device manufacturing ; electrochemical
• NDLC: M17; PA
• Note (General): Selected papers.; Held at the Joint international meeting: 192nd Meeting of the Electrochemical Society and the 48th Annual meeting of the International Society of Electrochemistry. Held as part of the Symposium on silicon cleaning technology.; Index term: crystalline defects ; crystalling contamination ; device manufacturing ; electrochemical.; BL shelfmark: 6695.400 vol 97-22 1997.
• Holding library: 国立国会図書館
• Call No.: M17-98-1441
• Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書; https://ndlsearch.ndl.go.jp
• Bibliographic ID (NDL): 000003506308; http://id.ndl.go.jp/bib/000003506308
• UKMARC No.: G05457746
• Bibliographic Record Category (NDL): 215