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図書

Photomask and X-ray mask technology 5 : 5th International symposium : Apr 1998, Kawasaki, Japan. (SPIE Proceedings ; 3412)

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Photomask and X-ray mask technology 5 : 5th International symposium : Apr 1998, Kawasaki, Japan.

(SPIE Proceedings ; 3412)

Call No. (NDL)
M17-98-2012
Bibliographic ID of National Diet Library
000003506945
Material type
図書
Author
BACUS.ほか
Publisher
SPIE
Publication date
1998.
Material Format
Paper
Capacity, size, etc.
v.
NDC
-
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Notes on use

Note (General)：

Selected papers.Also known as Photomask Japan '98.Index term: photomask technology ; X ray mask technology ; SPIE....

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Paper

Material Type
図書
ISBN
0819428647 (pbk)
ISSN
0277-786X
Title
Photomask and X-ray mask technology 5 : 5th International symposium : Apr 1998, Kawasaki, Japan.
Series Title
SPIE Proceedings ; 3412
Author Heading
BACUS.
Photomask Japan.
SPIE-The International Society for Optical Engineering.
Publication, Distribution, etc.
SPIE
Publication Date
1998.
Publication Date (W3CDTF)
1998
Extent
v.