Electron microscopy of semiconducting materials and ULSI devices : Symposium : Spring meeting : Apr 1998, San Francisco, CA. (Materials Research Society Symposia Proceedings ; 523)

Electron microscopy of semiconducting materials and ULSI devices : Symposium : Spring meeting : Apr 1998, San Francisco, CA.

(Materials Research Society Symposia Proceedings ; 523)

Call No. (NDL): M17-98-2056
Bibliographic ID of National Diet Library: 000003506999

Material type: 図書

Author: Materials Research Society.

Publisher: Materials Research Society

Publication date: 1998.

Material Format: Paper

Capacity, size, etc.: v.

NDC: -

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Notes on use

Note (General)：: Papers.Index term: electron microscopy ; semiconducting materials ; ULSI devices ; MRS.BL shelfmark: 5396.412 vol 523 1998.

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Paper

Material Type: 図書
ISBN: 1558994297
ISSN: 0272-9172
Title: Electron microscopy of semiconducting materials and ULSI devices : Symposium : Spring meeting : Apr 1998, San Francisco, CA.
Series Title: Materials Research Society Symposia Proceedings ; 523
Author Heading: Materials Research Society.
Publication, Distribution, etc.: Warrendale, Pa. : Materials Research Society
Publication Date: 1998.
Publication Date (W3CDTF): 1998
Extent: v.
Alternative Title: electron microscopy ; semiconducting materials ; ULSI devices ; MRS
NDLC: M17
ND
Note (General): Papers.
Index term: electron microscopy ; semiconducting materials ; ULSI devices ; MRS.
BL shelfmark: 5396.412 vol 523 1998.
Holding library: 国立国会図書館
Call No.: M17-98-2056
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003506999
http://id.ndl.go.jp/bib/000003506999
UKMARC No.: G05594392
Bibliographic Record Category (NDL): 215