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Recombination lifetime measurements in silicon : Advanced workshop on silicon recombination lifetime characterization methods : Jun 1997, Santa Clara, CA. (ASTM Special Technical Publication ; 1340)

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Recombination lifetime measurements in silicon : Advanced workshop on silicon recombination lifetime characterization methods : Jun 1997, Santa Clara, CA.

(ASTM Special Technical Publication ; 1340)

Call No. (NDL)
M17-99-0107
Bibliographic ID of National Diet Library
000003507191
Material type
図書
Author
Semiconductor Equipment and Materials Institute.ほか
Publisher
ASTM
Publication date
1998.
Material Format
Paper
Capacity, size, etc.
v.
NDC
-
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Papers and discussion.Index term: silicon recombination lifetime characterization methods ; recombination lifetime measurements ; SEMI ; ASTM.BL shelf...

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Paper

Material Type
図書
ISBN
0803124899
Title
Recombination lifetime measurements in silicon : Advanced workshop on silicon recombination lifetime characterization methods : Jun 1997, Santa Clara, CA.
Series Title
ASTM Special Technical Publication ; 1340
Author Heading
Semiconductor Equipment and Materials Institute.
American Society for Testing and Materials. Committee F1 on Electronics.
Publication, Distribution, etc.
West Conshohocken, PA : ASTM
Publication Date
1998.
Publication Date (W3CDTF)
1998
Extent
v.
Alternative Title
silicon recombination lifetime characterization methods ; recombination lifetime measurements ; SEMI ; ASTM