Rapid thermal processing : Symposium I : Spring conference : Jun 1998, Strasbourg, France. (Symposia Proceedings - European Materials Research Society ; 84)

Rapid thermal processing : Symposium I : Spring conference : Jun 1998, Strasbourg, France.

(Symposia Proceedings - European Materials Research Society ; 84)

Call No. (NDL): M17-99-0882
Bibliographic ID of National Diet Library: 000003508507

Material type: 図書

Author: European Materials Research Society.

Publisher: Pergamon

Publication date: 1999.

Material Format: Paper

Capacity, size, etc.: v.

NDC: -

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Notes on use

Note (General)：: Papers and abstracts.RTP is short for rapid thermal processing. Reprinted from Materials science in semiconductor processing vol 1 (3, 4)Index term: r...

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Paper

Material Type: 図書
ISBN: 0080436129
Title: Rapid thermal processing : Symposium I : Spring conference : Jun 1998, Strasbourg, France.
Series Title: Symposia Proceedings - European Materials Research Society ; 84
Author Heading: European Materials Research Society.
Publication, Distribution, etc.: Pergamon
Publication Date: 1999.
Publication Date (W3CDTF): 1999
Extent: v.
Alternative Title: RTP is short for rapid thermal processing. Reprinted from Materials science in semiconductor processing vol 1(3,4)
rapid thermal processing ; E MRS ; RTP
NDLC: M17
ND
Note (General): Papers and abstracts.
RTP is short for rapid thermal processing. Reprinted from Materials science in semiconductor processing vol 1 (3, 4)
Index term: rapid thermal processing ; E MRS ; RTP.
Holding library: 国立国会図書館
Call No.: M17-99-0882
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003508507
http://id.ndl.go.jp/bib/000003508507
Bibliographic Record Category (NDL): 215