図書

Ion implantation into semiconductors, oxides and ceramics : Symposium J : Spring meeting : Jun 1998, Strasbourg, France. (Symposia Proceedings - European Materials Research Society ; 85)

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Ion implantation into semiconductors, oxides and ceramics : Symposium J : Spring meeting : Jun 1998, Strasbourg, France.

(Symposia Proceedings - European Materials Research Society ; 85)

Call No. (NDL)
M17-99-0883
Bibliographic ID of National Diet Library
000003508508
Material type
図書
Author
European Materials Research Society.
Publisher
North-Holland
Publication date
1999.
Material Format
Paper
Capacity, size, etc.
v.
NDC
-
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Notes on use

Note (General):

Papers.Reprinted from Nuclear instruments and methods B vol 147 (1, 2, 3, 4)Index term: ion implantation ; semiconductors ; oxides ; E MRS.

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Paper

Material Type
図書
Publication, Distribution, etc.
Publication Date
1999.
Publication Date (W3CDTF)
1999
Extent
v.
Alternative Title
Reprinted from Nuclear instruments and methods B vol 147(1,2,3,4)
ion implantation ; semiconductors ; oxides ; E MRS
NDLC