Search by Bookstore
Search by Bookstore
Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 図書
- Author Heading
- Publication, Distribution, etc.
- Publication Date
- 1999.
- Publication Date (W3CDTF)
- 1999
- Extent
- v.
- Alternative Title
- Reprinted from Nuclear instruments and methods B vol 147(1,2,3,4)ion implantation ; semiconductors ; oxides ; E MRS