Ultra clean processing of silicon surfaces : 4th International symposium : Sep 1998, Ostend, Belgium. (Diffusion and Defect Data Part B Solid State Phenomena ; 65,66)

Ultra clean processing of silicon surfaces : 4th International symposium : Sep 1998, Ostend, Belgium.

(Diffusion and Defect Data Part B Solid State Phenomena ; 65,66)

Call No. (NDL): M17-99-1070
Bibliographic ID of National Diet Library: 000003508647

Material type: 図書

Author: Interuniversity Micro-Electronics Center.

Publisher: Scitec Publications

Publication date: 1999.

Material Format: Paper

Capacity, size, etc.: v.

NDC: -

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Notes on use

Note (General)：: Papers.Also known as UCPSS '98.Index term: UCPSS ; silicon surfaces ; IMEC ; ultra clean processing....

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Paper

Material Type: 図書
ISBN: 3908450403 (pbk)
ISSN: 1012-0394
Title: Ultra clean processing of silicon surfaces : 4th International symposium : Sep 1998, Ostend, Belgium.
Series Title: Diffusion and Defect Data Part B Solid State Phenomena ; 65,66
Author Heading: Interuniversity Micro-Electronics Center.
Publication, Distribution, etc.: Scitec Publications
Publication Date: 1999.
Publication Date (W3CDTF): 1999
Extent: v.
Alternative Title: Also known as UCPSS '98
UCPSS ; silicon surfaces ; IMEC ; ultra clean processing
NDLC: M17
PA
Note (General): Papers.
Also known as UCPSS '98.
Index term: UCPSS ; silicon surfaces ; IMEC ; ultra clean processing.
BL shelfmark: 3584.255 vol 65-66 1999.
Holding library: 国立国会図書館
Call No.: M17-99-1070
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003508647
http://id.ndl.go.jp/bib/000003508647
UKMARC No.: G05722672
Bibliographic Record Category (NDL): 215