Design, test and microfabrication of MEMS and MOEMS : Symposium : Mar 1999, Paris, France. (SPIE Proceedings ; 3680)

Design, test and microfabrication of MEMS and MOEMS : Symposium : Mar 1999, Paris, France.

(SPIE Proceedings ; 3680)

Notes on use

Note (General)：: Papers.In 2 parts. Contains 2 conferences: Conference on CAD, design and test and Conference on micromachining and microfabrication.Index term: microf...

You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.

Material Type: 図書
ISBN: 0819431540 (pbk)
ISSN: 0277-786X
Title: Design, test and microfabrication of MEMS and MOEMS : Symposium : Mar 1999, Paris, France.
Series Title: SPIE Proceedings ; 3680
Author Heading: SPIE-The International Society for Optical Engineering.
Techniques de l'Informatique et de la Microelectronique pour l'Architecture d'Ordinateurs (TIMA)
Publication, Distribution, etc.: SPIE
Publication Date: 1999.
Publication Date (W3CDTF): 1999
Extent: v.
Alternative Title: In 2 parts. Contains 2 conferences: Conference on CAD, design and test and Conference on micromachining and microfabrication
microfabrication ; SPIE ; MEMS ; MOEMS
NDLC: M17
ND
Note (General): Papers.
In 2 parts. Contains 2 conferences: Conference on CAD, design and test and Conference on micromachining and microfabrication.
Index term: microfabrication ; SPIE ; MEMS ; MOEMS.
BL shelfmark: 6823.100 vol 3680 1999.
Holding library: 国立国会図書館
Call No.: M17-99-1877
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003509427
http://id.ndl.go.jp/bib/000003509427
UKMARC No.: G05863400
Bibliographic Record Category (NDL): 215