Laser applications in microelectronic and optoelectronic manufacturing 4 : Conference : Jan 1999, San Jose, CA. (SPIE Proceedings ; 3618)

Laser applications in microelectronic and optoelectronic manufacturing 4 : Conference : Jan 1999, San Jose, CA.

(SPIE Proceedings ; 3618)

Notes on use

Note (General)：: Selected papers.Held in the framework of the Micro Engineering/ manufacturing program at Photonics West '99. Also known as LAMOM-4.Index term: laser a...

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Material Type: 図書
ISBN: 0819430889 (pbk)
ISSN: 0277-786X
Title: Laser applications in microelectronic and optoelectronic manufacturing 4 : Conference : Jan 1999, San Jose, CA.
Series Title: SPIE Proceedings ; 3618
Author Heading: SPIE-The International Society for Optical Engineering.
US Air Force Office of Scientific Research (AFOSR)
Publication, Distribution, etc.: SPIE
Publication Date: 1999.
Publication Date (W3CDTF): 1999
Extent: v.
Alternative Title: Held in the framework of the Micro Engineering/ manufacturing program at Photonics West '99. Also known as LAMOM-4
laser applications ; SPIE ; microelectronic manufacturing ; LAMOM
NDLC: M17
ND
Note (General): Selected papers.
Held in the framework of the Micro Engineering/ manufacturing program at Photonics West '99. Also known as LAMOM-4.
Index term: laser applications ; SPIE ; microelectronic manufacturing ; LAMOM.
BL shelfmark: 6823.100 vol 3618 1999.
Holding library: 国立国会図書館
Call No.: M17-99-2090
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003509661
http://id.ndl.go.jp/bib/000003509661
UKMARC No.: G05868230
Bibliographic Record Category (NDL): 215