Process, equipment, and materials control in integrated circuit manufacturing 5 : Conference : Sep 1999, Santa Clara, CA. (SPIE Proceedings ; 3882)

Process, equipment, and materials control in integrated circuit manufacturing 5 : Conference : Sep 1999, Santa Clara, CA.

(SPIE Proceedings ; 3882)

Notes on use

Note (General)：: Papers.Index term: integrated circuit manufacturing ; SPIE ; materials control.BL shelfmark: 6823.100 vol 3882 1999.

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Material Type: 図書
ISBN: 0819434795 (pbk)
ISSN: 0277-786X
Title: Process, equipment, and materials control in integrated circuit manufacturing 5 : Conference : Sep 1999, Santa Clara, CA.
Series Title: SPIE Proceedings ; 3882
Author Heading: SPIE-The International Society for Optical Engineering.
Publication, Distribution, etc.: SPIE
Publication Date: 1999.
Publication Date (W3CDTF): 1999
Extent: v.
Alternative Title: integrated circuit manufacturing ; SPIE ; materials control
NDLC: M17
M271
Note (General): Papers.
Index term: integrated circuit manufacturing ; SPIE ; materials control.
BL shelfmark: 6823.100 vol 3882 1999.
Holding library: 国立国会図書館
Call No.: M17-00-0267
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003510066
http://id.ndl.go.jp/bib/000003510066
UKMARC No.: G05906522
Bibliographic Record Category (NDL): 215