Materials and device characterization in micromachining 2 : 5th Conference : Sep 1999, Santa Clara, CA. (SPIE Proceedings ; 3875)

Materials and device characterization in micromachining 2 : 5th Conference : Sep 1999, Santa Clara, CA.

(SPIE Proceedings ; 3875)

Notes on use

Note (General)：: Papers.Index term: micromachining ; materials characterization ; device characterization ; SPIE.BL shelfmark: 6823.100 vol 3875 1999.

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Material Type: 図書
ISBN: 0819434728 (pbk)
ISSN: 0277-786X
Title: Materials and device characterization in micromachining 2 : 5th Conference : Sep 1999, Santa Clara, CA.
Series Title: SPIE Proceedings ; 3875
Author Heading: SPIE-The International Society for Optical Engineering.
Publication, Distribution, etc.: SPIE
Publication Date: 1999.
Publication Date (W3CDTF): 1999
Extent: v.
Alternative Title: micromachining ; materials characterization ; device characterization ; SPIE
NDLC: M17
ND
Note (General): Papers.
Index term: micromachining ; materials characterization ; device characterization ; SPIE.
BL shelfmark: 6823.100 vol 3875 1999.
Holding library: 国立国会図書館
Call No.: M17-00-0615
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003510422
http://id.ndl.go.jp/bib/000003510422
UKMARC No.: G05926765
Bibliographic Record Category (NDL): 215