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Fundamental aspects of ultrathin dielectrics on si-based devices -- : Fundamental aspects of ultrathin dielectrics on Si-based devices: towards an atomic scale understanding : NATO Advanced Research Workshop : Aug 1997, St Petersburg, Russia. (NATO Science Series Partnership Sub-Series 3 High Technology ; 47)

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Fundamental aspects of ultrathin dielectrics on si-based devices -- : Fundamental aspects of ultrathin dielectrics on Si-based devices: towards an atomic scale understanding : NATO Advanced Research Workshop : Aug 1997, St Petersburg, Russia.

(NATO Science Series Partnership Sub-Series 3 High Technology ; 47)

Call No. (NDL)
M17-00-0874
Bibliographic ID of National Diet Library
000003510693
Material type
図書
Author
-
Publisher
Kluwer Academic Publishers
Publication date
1998.
Material Format
Paper
Capacity, size, etc.
v.
NDC
-
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Notes on use

Note (General)：

Papers.Index term: ultrathin dielectrics ; Si based devices ; NATO.BL shelfmark: 6033.64894 vol 47 1998.

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Paper

Material Type
図書
ISBN
0792350073 (alk. paper)
Title
Fundamental aspects of ultrathin dielectrics on si-based devices -- : Fundamental aspects of ultrathin dielectrics on Si-based devices: towards an atomic scale understanding : NATO Advanced Research Workshop : Aug 1997, St Petersburg, Russia.
Series Title
NATO Science Series Partnership Sub-Series 3 High Technology ; 47
Publication, Distribution, etc.
Dordrecht : Kluwer Academic Publishers
Boston : Kluwer Academic Publishers
Publication Date
1998.
Publication Date (W3CDTF)
1998
Extent
v.
Alternative Title
ultrathin dielectrics ; Si based devices ; NATO
NDLC
M17