Creation of molecular resists for nanometer lithography

Creation of molecular resists for nanometer lithography

Call No. (NDL): UT51-2002-F619
Bibliographic ID of National Diet Library: 000003537215

Material type: 博士論文

Author: Toshiaki Kadota [著]

Publisher: [Toshiaki Kadota]

Publication date: 2002

Material Format: Paper

Capacity, size, etc.: 1冊

Name of awarding university/degree: 大阪大学,博士 (工学)

Notes on use

Note (General)：: 博士論文

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Paper

Material Type: 博士論文
Title: Creation of molecular resists for nanometer lithography
Author/Editor: Toshiaki Kadota [著]
Author Heading: 門田, 敏明カドタ, トシアキ
Publication, Distribution, etc.: [Toshiaki Kadota]
Publication Date: 2002
Publication Date (W3CDTF): 2002
Extent: 1冊
Alternative Title: ナノリソグラフィ用分子性レジスト材料の創製ナノリソグラフィヨウブンシセイレジストザイリョウノソウセイ
Degree grantor/type: 大阪大学
Date Granted: 平成14年3月25日
Date Granted (W3CDTF): 2002
Dissertation Number: 甲第8534号
Degree Type: 博士 (工学)
Note (Dissertation): 博士論文
Place of Publication (Country Code): JP
Text Language Code: eng
NDLC: UT51
Note (General): 博士論文
Holding library: 国立国会図書館
Call No.: UT51-2002-F619
Data Provider (Database): 国立国会図書館 : 国立国会図書館蔵書
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 000003537215
http://id.ndl.go.jp/bib/000003537215
Bibliographic Record Category (NDL): 213