図書

マイクロマシン技術と応用

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マイクロマシン技術と応用

Call No. (NDL)
NB21-G73
Bibliographic ID of National Diet Library
000003632422
Material type
図書
Author
北原時雄, 石川雄一 監修
Publisher
シーエムシー出版
Publication date
2002.3
Material Format
Paper
Capacity, size, etc.
328p ; 27cm
NDC
530
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Table of Contents

  • 目次

  • 【基礎編】

  • 第1章 マイクロファブリケーション

  • 1 総論/ 1

    石川雄一

  • 1.1 各種微細加工技術の特徴/ 3

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Northern Japan

  • 岩手県立図書館

    Paper
    Call No.:
    530/マイ/
    Book Registration Number:
    1103706188

other

  • 農林水産関係試験研究機関総合目録

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    Paper
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  • CiNii Research

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Paper

Material Type
図書
ISBN
4-88231-346-4
Title Transcription
マイクロマシン ギジュツ ト オウヨウ
Author/Editor
北原時雄, 石川雄一 監修
Author Heading
北原, 時雄, 1937- キタハラ, トキオ, 1937- ( 00877930 )Authorities
石川, 雄一, 機械システム イシカワ, ユウイチ, キカイ システム ( 00877931 )Authorities
Publication, Distribution, etc.
Publication Date
2002.3
Publication Date (W3CDTF)
2002
Extent
328p