図書

VLSIプロセス技術 : 高歩留りのための問題点とその解決 第2版

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VLSIプロセス技術 : 高歩留りのための問題点とその解決

第2版

Call No. (NDL)
ND386-G216
Bibliographic ID of National Diet Library
000003643395
Material type
図書
Author
垂井康夫 監修ほか
Publisher
日刊工業新聞社
Publication date
2002.3
Material Format
Paper
Capacity, size, etc.
169p ; 22cm
NDC
549.7
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Paper

Material Type
図書
ISBN
4-526-04905-0
Title Transcription
VLSI プロセス ギジュツ : コウブドマリ ノ タメノ モンダイテン ト ソノ カイケツ
Author/Editor
垂井康夫 監修
小林稔, 中島蕃 著
Edition
第2版
Author Heading
垂井, 康夫, 1929- タルイ, ヤスオ, 1929- ( 00082811 )Authorities
小林, 稔, 1932- コバヤシ, ミノル, 1932- ( 00315725 )Authorities
中島, 蕃, 1946- ナカジマ, シゲル, 1946- ( 00315726 )Authorities
Publication, Distribution, etc.
Publication Date
2002.3
Publication Date (W3CDTF)
2002